Gas Plasma Cleaners | RIE·DP Mode, Parallel Plate Electrode

PDC200/210/510

Small plasma cleaners suitable for research and development.

Using plasma surface treatment equipment. Focusing on “easy to use” high-performance desktop models, easy to retrieve data, centered on electronic materials, suitable for various purposes.

Usage

• CSP, BGA, COB substrate plasma cleaning
• Removal of organic films and metal oxide films
• Dry cleaning of printed circuit boards
• Interface activation treatment
• LED packaging

Features

• DP mode (standard on PDC510, optional on PDC200/210)
• RIE mode
• High uniformity electrode structure
• Simple touch screen controller operation

Shared Specifications

Category	PDC Series
Electrode structure	Parallel plate (fixed)
Frequency	13.56MHz
Control/display	LCD touch screen
Reaction chamber material	Aluminum A5052
Reaction gas	2 Systems (Ar, O₂)
Filling gas	N₂ or dry air
Gas inlet	2 reaction gas, 1 filling gas

Difference Between Model

Model	PDC200	PDC210	PDC510
Plasma mode	RIE (DP mode optional)	RIE (DP mode optional)	RIE/DP
High frequency output	Max. 300W	Max. 500W	Max. 500W
Reaction chamber dimensions	W400×D250×H150mm	W400×D250×H150mm	W500×D300×H200mm
Electrode dimensions	W250×D170mm	W250×D170mm	W400×D200mm
Reaction gas flow control	Flow meter	Polymer controller	Polymer controller
Vacuum pump	Optional	Oil pump (Approx. 345L/min) std.	Oil pump (Approx. 500L/min) std.
External dimensions	W540×D600×H600mm	W540×D600×H600mm	W700×D700×H1285mm
Weight	Approx. 100kg	Approx. 105kg	Approx. 180kg
Power supply	Single phase AC100V 10A	3-phase AC200V 6A	3-phase AC200V 8A

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As an authorized distributor of Yamato Scientific in Indonesia, PT Universal Labora Analitika proudly provides the full range of Yamato Scientific Products. Contact us for more detailed catalog.