Gas Plasma Reactors | DP Mode, Barrel

PR500/510/1000

Low-temperature plasma, classic barrel. PR500: manual control PR510/1000: automatic touch screen control

The classic model of low-temperature plasma is very historic. With automatic coordination function and touch screen operation (PR510/1000), it improves operability and safety.

Usage

• Photoresist removal
• Component cleaning
• Interface activation
• Micro polishing
• Compatible with silicon wafers and glass substrates

Features

• Large diameter (Φ215mm) quartz reaction chamber
• Compact integrated design
• Simple touch screen operation (PR510/1000)

Specifications

Model	PR500	PR510	PR1000
Mode	DP mode, barrel	DP mode, barrel	DP mode, barrel
High frequency output power	Max. 500W	Max. 500W	Max. 1000W
Frequency	13.56MHz	13.56MHz	13.56MHz
Tuning method	Automatic coordination	Automatic coordination	Automatic coordination
Reaction chamber	Quartz Φ215×305mm	Quartz Φ215×305mm	Φ400×500mm
Reaction gas	2System (O₂, CF₄)	2System (O₂, CF₄)	2System (O₂, CF₄)
Control	Manual	Touch screen automatic control	Touch screen automatic control
Piping material	Stainless steel, teflon	Stainless steel, teflon	Stainless steel, teflon
External dimension	W438×D520×H760mm	W520×D630×H760mm	W800×D900×H1706mm
Weight	Approx. 60kg	Approx. 70kg	Approx. 70kg
Power supply	Single phase AC100V 9A	3-phase AC200V 8A	3-phase AC200V 8A

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As an authorized distributor of Yamato Scientific in Indonesia, PT Universal Labora Analitika proudly provides the full range of Yamato Gas Plasma Reactors for laboratories.